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Stone Pillar SuiteTM ProcessFlowManagerManagement system for Process Modules and Flows -- Stone Pillar Suite ProcessFlowManager provides a convenient tool for review of process flow details in a hierachical viewer that lets you drill down to the needed level of detail for process steps of interest while shielding unnecessary details from other process steps.ProcessFlowManager also provides a process management level view that provides module usage and process staus indications in a convenient filterable table. ProcessFlowManager includes highlighting capabilities that make it easy for remote locations to communicate unambiguously about specific process steps. ProcessFlowManager includes revision control and difference analysis that make it easy to analyze changes in process flow over time and connect these with changes in device performance or yield. ProcessFlowManager saves all process flows to the Stone Pillar Suite database so that they can be linked to individual measured data and experiments.
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